{"id":10303,"date":"2025-07-17T09:01:06","date_gmt":"2025-07-17T00:01:06","guid":{"rendered":"https:\/\/blog.agentsoft.co.kr\/index.php\/2025\/07\/17\/10303\/"},"modified":"2025-07-17T09:01:06","modified_gmt":"2025-07-17T00:01:06","slug":"%ec%a0%95%eb%b3%b4%eb%94%94%ec%8a%a4%ed%94%8c%eb%a0%88%ec%9d%b4%ed%95%99%ea%b3%bc-%ea%b4%91%ec%a0%84%ec%9e%90%ea%b3%b5%ed%95%99-4%ec%b0%a8-%ea%b2%b0%ea%b3%bc-%eb%b3%b4%ea%b3%a0%ec%84%9c-fabrication-o","status":"publish","type":"post","link":"https:\/\/blog.agentsoft.co.kr\/index.php\/2025\/07\/17\/10303\/","title":{"rendered":"\uc815\ubcf4\ub514\uc2a4\ud50c\ub808\uc774\ud559\uacfc \uad11\uc804\uc790\uacf5\ud559 4\ucc28 \uacb0\uacfc \ubcf4\uace0\uc11c  Fabrication of CNT emitters as the an electron beam source, Fabrication of a phosphor, CNT \ud2b9\uc131 \uad00\ucc30"},"content":{"rendered":"<p><img decoding=\"async\" src=\"https:\/\/image4.happycampus.com\/Production\/thumb212\/2024\/01\/30\/data29416713-0001.jpg\"><img decoding=\"async\" src=\"https:\/\/image4.happycampus.com\/Production\/thumb212\/2024\/01\/30\/data29416713-0002.jpg\"><\/p>\n<p><strong>\ubaa9\ucc28<\/strong><\/p>\n<p>\u2160. \uc2e4\ud5d81 &#8211; Fabrication of CNT emitters as the an electron beam source<br \/>\n\u2161. \uc2e4\ud5d82 &#8211; Fabrication of a phosphor, CNT \ud2b9\uc131 \uad00\ucc30<br \/>\n\u2162. \uc2e4\ud5d83 &#8211; Electron emission from CNT emitters &amp; CL measurement<\/p>\n<p><strong>\ubcf8\ubb38\ub0b4\uc6a9<\/strong><\/p>\n<p>\uc2e4\ud5d81 &#8211; Fabrication of CNT emitters as the an electron beam source<br \/>\n1\t\uc2e4\ud5d8 \ubaa9\uc801<br \/>\nCNT\uc758 \uc81c\uc791 \uacfc\uc815\uc744 \uc774\ud574\ud558\uace0, Photolithography \uc2e4\uc2b5\uc744 \ud1b5\ud574 \ud574\ub2f9 \uacf5\uc815\uc744 \uc774\ud574\ud55c\ub2e4.<br \/>\n2\t\uc2dc\uc57d \ubc0f \uc7a5\ube44<br \/>\ni.\tUV Source<br \/>\nPhoto \uacf5\uc815\uc5d0\uc11c \uc790\uc678\uc120\uc744 \uc774\uc6a9\ud55c Exposure\ub97c \ud574\uc8fc\uae30 \uc704\ud574\uc11c \ud544\uc694\ud55c \uc7a5\ube44\uc774\ub2e4. \ucf54\ud305\ud55c PR\uc774 UV\uc640 \uad6d\ubd80\uc801\uc73c\ub85c \ubc18\uc751\ud558\uac8c\ub054 \ub9c8\uc2a4\ud06c\ub97c \uc774\uc6a9\ud574\uc11c \uc120\ud0dd\uc801\uc73c\ub85c \uc81c\uac70\ud574 \ud328\ud134\uc744 \uc0c8\uae30\ub294, Photolithography \uc5d0\uc11c \ub9e4\uc6b0 \uc911\uc694\ud55c \uc7a5\ube44\uc774\ub2e4.<br \/>\nii.\tSpin coater<br \/>\n\ubc15\ub9c9\uc744 \ud615\uc131\ud558\uae30 \uc704\ud574 \uc9c4\uacf5\uc73c\ub85c Substrate\ub97c \uace0\uc815\uc2dc\ud0a8 \ub4a4, \uc6a9\uc561\uc744 \ub5a8\uc5b4\ud2b8\ub824 \ud68c\uc804\uc2dc\ucf1c \ubc15\ub9c9\uc744 \ud615\uc131\ud558\ub294 \uae30\uad6c\uc774\ub2e4. \uc2e4\ud5d8\uc5d0\uc11c\ub294 \uc2e4\ub9ac\ucf58 \uc6e8\uc774\ud37c\uc5d0 PR\uc744 \ucf54\ud305\ud560 \ub54c \uc4f4\ub2e4.<br \/>\niii.\tAZ 300 MIF Developer<br \/>\n\ud604\uc0c1\uc561\uc774\ub77c\uace0\ub3c4 \ud558\uba70, \ub178\uad11\ub41c \uc601\uc5ed\uacfc \uadf8\ub807\uc9c0 \ub418\uc9c0 \uc54a\uc740 \uc601\uc5ed\uc758 PR\uc744 \uc120\ud0dd\uc801\uc73c\ub85c \uc81c\uac70\ud558\uc5ec \ubd80\ubd84\uc801\uc73c\ub85c \uc5d0\uce6d\uc744 \uac00\ub2a5\ud558\uac8c \ud574\uc8fc\ub294 \uc5ed\ud560\uc744 \ud55c\ub2e4.<br \/>\niv.\tPhoto resist<br \/>\n\ud3ec\ud1a0 \ub808\uc9c0\uc2a4\ud2b8\ub294 \ube5b\uc744 \uc870\uc0ac\ud558\uba74 \ud654\ud559 \ubcc0\ud654\ub97c \uc77c\uc73c\ud0a4\ub294 \uc218\uc9c0\ub97c \ub9d0\ud558\uba70, \uc790\uc678\uc601\uc5ed \uac00\uc2dc\uc601\uc5ed \ud30c\uc7a5\uae4c\uc9c0\uc758 \ube5b\uc5d0 \ubc18\uc751\ud558\uc5ec \uc6a9\ud574, \uc751\uace0\uc758 \ubcc0\ud654\ub97c \uc77c\uc73c\ud0a8\ub2e4. \uc6e8\uc774\ud37c(wafer)\uc5d0 \ud3ec\ud1a0 \ub808\uc9c0\uc2a4\ud2b8\ub97c \uce60\ud558\uace0, \ub178\uad11\uc7a5\uce58\ub85c IC\uc758 \ud68c\ub85c \ud328\ud134\uc744 \uc18c\ubd80\ud558\uc5ec \uc57d\ud488\uc73c\ub85c \ud604\uc0c1\ud558\uba74 \ube5b\uc774 \ub2ff\uc740 \ubd80\ubd84 \ub610\ub294 \ub2ff\uc9c0 \uc54a\uc740 \ubd80\ubd84\ub9cc \ud3ec\ud1a0 \ub808\uc9c0\uc2a4\ud2b8\uac00 \ub0a8\ub294\ub2e4.<br \/>\n\ud3ec\ud1a0 \ub808\uc9c0\uc2a4\ud2b8\ub294 \uc804\uc790 \uc18c\uc790\uc758 \ud68c\ub85c\uc640 \ud654\uc0c1 \ud615\uc131 \ub4f1\uc5d0 \uc0ac\uc6a9\ub418\uace0 \uc788\uc73c\uba70, IC, LSI, \ucd08 LSI\uc758 \ubbf8\uc138\ud558\uace0 \ubcf5\uc7a1\ud55c \ud68c\ub85c \ud328\ud134 \uc81c\uc791\uc5d0 \ubd88\uac00\uacb0\ud55c \uc7ac\ub8cc\uc758 \ud558\ub098\uc774\ub2e4. PR\uc758 \uc885\ub958\ub294 \uacb0\ub860 \ubc0f \uace0\ucc30\uc5d0\uc11c \uc870\uc0ac\ud558\uc600\ub2e4.<br \/>\nv.\tD.I water<br \/>\nDe-Ionized Water\uc758 \uc904\uc784\ub9d0\ub85c, \ub0b4\ubd80\uc5d0 \uc788\ub294 \uc774\uc628\ub4e4\uc744 \uc81c\uac70\ud55c \ub9e4\uc6b0 \uc21c\uc218\ud55c \ubb3c\uc774\ub2e4. \ubcf5\uc7a1\ud55c \uacf5\uc815\uc744 \uac70\uccd0 \uc218\uc911 \uc624\uc5fc \ubb3c\uc9c8\uc744 \uc804\ubd80 \uc81c\uac70\ud55c\ub2e4. \ubd88\uc21c\ubb3c\uc5d0 \ubbfc\uac10\ud55c \ubc18\ub3c4\uccb4 \uc81c\uc870\uacf5\uc815\uc5d0\uc11c \uad11\ubc94\uc704\ud558\uac8c \uc0ac\uc6a9\ud558\ub294 \uc6a9\uc561\uc774\ub2e4.<\/p>\n<p>\ucd9c\ucc98 : <a href=\"https:\/\/www.happycampus.com\/report-doc\/29416713\/\" target=\"_blank\">\ud574\ud53c\ucea0\ud37c\uc2a4<\/a><\/p>\n","protected":false},"excerpt":{"rendered":"<p>\ubaa9\ucc28 \u2160. \uc2e4\ud5d81 &#8211; Fabrication of CNT emitters as the an electron beam source \u2161. \uc2e4\ud5d82 &#8211; Fabrication of a phosphor, CNT \ud2b9\uc131 \uad00\ucc30 \u2162. \uc2e4\ud5d83 &#8211; Electron emission from CNT emitters &amp; CL measurement \ubcf8\ubb38\ub0b4\uc6a9 \uc2e4\ud5d81 &#8211; Fabrication of CNT emitters as the an electron beam source 1 \uc2e4\ud5d8 \ubaa9\uc801 CNT\uc758 \uc81c\uc791 \uacfc\uc815\uc744 \uc774\ud574\ud558\uace0, [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[1],"tags":[9619,2535,15714],"class_list":["post-10303","post","type-post","status-publish","format-standard","hentry","category-uncategorized","tag-10-","tag-2535","tag-15714"],"_links":{"self":[{"href":"https:\/\/blog.agentsoft.co.kr\/index.php\/wp-json\/wp\/v2\/posts\/10303","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/blog.agentsoft.co.kr\/index.php\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/blog.agentsoft.co.kr\/index.php\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/blog.agentsoft.co.kr\/index.php\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/blog.agentsoft.co.kr\/index.php\/wp-json\/wp\/v2\/comments?post=10303"}],"version-history":[{"count":0,"href":"https:\/\/blog.agentsoft.co.kr\/index.php\/wp-json\/wp\/v2\/posts\/10303\/revisions"}],"wp:attachment":[{"href":"https:\/\/blog.agentsoft.co.kr\/index.php\/wp-json\/wp\/v2\/media?parent=10303"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/blog.agentsoft.co.kr\/index.php\/wp-json\/wp\/v2\/categories?post=10303"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/blog.agentsoft.co.kr\/index.php\/wp-json\/wp\/v2\/tags?post=10303"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}