{"id":26139,"date":"2025-12-23T09:00:25","date_gmt":"2025-12-23T00:00:25","guid":{"rendered":"https:\/\/blog.agentsoft.co.kr\/index.php\/2025\/12\/23\/26139\/"},"modified":"2025-12-23T09:00:25","modified_gmt":"2025-12-23T00:00:25","slug":"%ec%84%9c%ec%9a%b8%ea%b3%bc%ed%95%99%ea%b8%b0%ec%88%a0%eb%8c%80_%eb%b0%98%eb%8f%84%ec%b2%b4%ec%a0%9c%ec%a1%b0%ea%b3%b5%ec%a0%95_%ed%81%b4%eb%a6%b0%eb%a3%b8-%ea%b2%ac%ed%95%99-%eb%b3%b4%ea%b3%a0","status":"publish","type":"post","link":"https:\/\/blog.agentsoft.co.kr\/index.php\/2025\/12\/23\/26139\/","title":{"rendered":"\uc11c\uc6b8\uacfc\ud559\uae30\uc220\ub300_\ubc18\ub3c4\uccb4\uc81c\uc870\uacf5\uc815_\ud074\ub9b0\ub8f8 \uacac\ud559 \ubcf4\uace0\uc11c A+"},"content":{"rendered":"

<\/p>\n

\ubaa9\ucc28<\/strong><\/p>\n

\uc81c 1 \uc7a5 \uc11c \ub860 <\/p>\n

\uc81c 2 \uc7a5 Photo & Etching \uacf5\uc815 <\/p>\n

\uc81c 1 \uc808 Photo \uacf5\uc815
\n 1. PR \ucc98\ub9ac
\n 2. \ub178\uad11(Exposure)<\/p>\n

\uc81c 2 \uc808 Etching \uacf5\uc815
\n 1. BOE(Buffered Oxide Etching) \uacf5\uc815
\n 2. PR \uc81c\uac70
\n 3. Etching<\/p>\n

\uc81c 3 \uc7a5 \uacb0\ub860 <\/p>\n

Equipments <\/p>\n

\ucc38\uace0\ubb38\ud5cc<\/p>\n

\ubcf8\ubb38\ub0b4\uc6a9<\/strong><\/p>\n

\uc81c 1 \uc808 Photo \uacf5\uc815<\/p>\n

1. PR \ucc98\ub9ac<\/p>\n

Photo\ub294 \uc0b0\ud654 \uacf5\uc815\uc774 \ub05d\ub09c wafer\ub97c \ud1b5\ud574 \uc774\ub8e8\uc5b4\uc9c4\ub2e4. \uc0b0\ud654 \uacf5\uc815\uc744 \uac70\uce58\uac8c \ub418\uba74 bare wafer\uc5d0 \uc0b0\ud654\ub9c9\uc774 \uc50c\uc6cc\uc9c0\uac8c \ub418\ub294\ub370 \uc6b0\ub9ac \uc2e4\ud5d8\uc5d0\uc11c \uc4f0\uc778 \uc0b0\ud654\ub9c9\uc740 \uc57d 5,000\u212b\uc774\uba70 \uc774\ub54c\uc758 wafer\ub294 \uae30\uc874 \uc740\uc0c9\uc5d0\uc11c \uc0b0\ud654\ub9c9\uc73c\ub85c \uc778\ud574 \ubd89\uc740\uc0c9\uc744 \ub760\uac8c \ub41c\ub2e4. <\/p>\n

\uc5ec\uae30\uc11c PR(Photo Resist)\uc744 \ub3c4\ud3ec(Coating)\ud558\uac8c \ub418\ub294\ub370 \uadf8 \uc804\uc5d0 \uce5c\uc218\uc131\uc778 \uc0b0\ud654\ub9c9\uacfc \uc18c\uc218\uc131\uc778 PR\uc744 \uc798 \uc811\ucc29 \uc2dc\ud0a4\uae30 \uc704\ud574 \ud504\ub77c\uc774\uba38(HMDS)\ub97c \ubfcc\ub9ac\ub294 \uacfc\uc815\uc744 \uac70\uce5c\ub2e4. \uc774\ud6c4 PR\uc744 \ubfcc\ub9ac\uac8c \ub41c\ub2e4.<\/p>\n

PR\uc740 Photo Resist\uc758 \uc57d\uc790\ub85c \ube5b\uc5d0 \ubbfc\uac10\ud558\uac8c \ubc18\uc751\ud558\uae30 \ub54c\ubb38\uc5d0 \uc2e4\ud5d8\uc2e4\uc5d0\uc11c\ub294 \uc8fc\ub85c \ud30c\uc7a5\uc774 \uc9e7\uc740 \ub178\ub780 \uc870\uba85\uc744 \uc0ac\uc6a9\ud55c\ub2e4. <\/p>\n

PR\uc740 Solvent\uc640 Resin, PAC(Photo Active Compound)\ub97c \ud63c\ud569\ud558\uc5ec \ub9cc\ub4e0 \uc6a9\uc561\uc73c\ub85c positive PR\uacfc negative PR\ub85c \ub098\ub258\uac8c \ub418\uba70 positive PR\uc740 \ub178\uad11 \ub41c \ubd80\ubd84\uc774 develop \uacfc\uc815\uc5d0\uc11c \uc0ac\ub77c\uc9c0\uac8c \ub418\ub294 \uac83\uc774\uace0 \ubbf8\uc138 \ud328\ud130\ub2dd \ub2a5\ub825\uc774 \ub6f0\uc5b4\ub098 \ub300\ubd80\ubd84\uc758 \uacf5\uc815\uc5d0\uc11c \uc0ac\uc6a9\ub418\uba70, negative PR\uc740 \ub178\uad11 \ub41c \ubd80\ubd84\uc774 \ub0a8\uac8c \ub418\ub294 \uac83\uc774\uba70 \ud2b9\uc218\ud55c \uacbd\uc6b0\uc5d0\ub9cc \uc0ac\uc6a9\ub41c\ub2e4. \uc6b0\ub9ac \uc2e4\ud5d8\uc5d0\uc11c \uc0ac\uc6a9\ud558\ub294 PR\uc740 positive PR\ub85c gxr 601\uc744 \uc0ac\uc6a9\ud55c\ub2e4. <\/p>\n

<\uc911 \ub7b5><\/p>\n

\uc81c 3 \uc7a5 \uacb0 \ub860<\/p>\n

\uc6b0\ub9ac\uac00 \uc2e4\uc81c Clean room\uc5d0 \ub4e4\uc5b4\uac08 \uae30\ud68c\ub3c4 \ub9ce\uc9c0 \uc54a\uace0 wafer\ub97c \uc9c1\uc811 \ub9cc\uc838 \ubcf4\uac70\ub098 \uc5ec\ub7ec \uc7a5\ube44\ub4e4\uc744 \uc2e4\uc81c\ub85c \ubcfc \uc77c\uc774 \ub9ce\uc9c0 \uc54a\uc740\ub370 \uc774\ubc88 \uae30\ud68c\uc5d0 \uc2e4\uc81c 4inch wafer\ub97c \ud3ec\ud1a0, \uc2dd\uac01 \uacf5\uc815\ud558\ub294 \uacfc\uc815\uc744 \ubcfc \uc218 \uc788\uc5b4 \ucc45\uc73c\ub85c \uacf5\ubd80\ud558\ub294 \uac83\uacfc\ub294 \ub2ec\ub9ac \uc27d\uac8c \uc774\ud574\ud558\uace0 \uacfc\uc815\uc774 \uc774\ub904\uc9c0\ub294 \uc21c\uc11c\uc640 \uc778\uacfc \uad00\uacc4\ub97c \uba85\ud655\ud788 \ud560 \uc218 \uc788\uc5b4 \uc88b\uc558\ub2e4…<\/p>\n

\ucd9c\ucc98 : \ud574\ud53c\ucea0\ud37c\uc2a4<\/a><\/p>\n","protected":false},"excerpt":{"rendered":"

\ubaa9\ucc28 \uc81c 1 \uc7a5 \uc11c \ub860 \uc81c 2 \uc7a5 Photo & Etching \uacf5\uc815 \uc81c 1 \uc808 Photo \uacf5\uc815 1. PR \ucc98\ub9ac 2. \ub178\uad11(Exposure) \uc81c 2 \uc808 Etching \uacf5\uc815 1. BOE(Buffered Oxide Etching) \uacf5\uc815 2. PR \uc81c\uac70 3. Etching \uc81c 3 \uc7a5 \uacb0\ub860 Equipments \ucc38\uace0\ubb38\ud5cc \ubcf8\ubb38\ub0b4\uc6a9 \uc81c 1 \uc808 Photo \uacf5\uc815 1. PR \ucc98\ub9ac Photo\ub294 \uc0b0\ud654 […]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[1],"tags":[32714,21152,32715,32716],"class_list":["post-26139","post","type-post","status-publish","format-standard","hentry","category-uncategorized","tag-32714","tag-21152","tag-32715","tag-32716"],"_links":{"self":[{"href":"https:\/\/blog.agentsoft.co.kr\/index.php\/wp-json\/wp\/v2\/posts\/26139","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/blog.agentsoft.co.kr\/index.php\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/blog.agentsoft.co.kr\/index.php\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/blog.agentsoft.co.kr\/index.php\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/blog.agentsoft.co.kr\/index.php\/wp-json\/wp\/v2\/comments?post=26139"}],"version-history":[{"count":0,"href":"https:\/\/blog.agentsoft.co.kr\/index.php\/wp-json\/wp\/v2\/posts\/26139\/revisions"}],"wp:attachment":[{"href":"https:\/\/blog.agentsoft.co.kr\/index.php\/wp-json\/wp\/v2\/media?parent=26139"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/blog.agentsoft.co.kr\/index.php\/wp-json\/wp\/v2\/categories?post=26139"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/blog.agentsoft.co.kr\/index.php\/wp-json\/wp\/v2\/tags?post=26139"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}